Lift pin driving device and a flat panel display manufacturing apparatus having same

ABSTRACT

A lift pin driving device and a flat panel display (FPD) manufacturing apparatus having the device are provided. The lift pin driving device can precisely move a plurality of lift pins using one motor, thus realizing a simple lift pin driving structure and a simple motor control structure. This allows a space below a chamber body of the manufacturing apparatus to be configured in a variety of ways, thus reducing the cost of equipment and the production cost of products.

This application claims the benefit of Korean Patent Application Nos.10-2006-0111227 filed on Nov. 10, 2006; and 10-2006-0111241 filed Nov.10, 2006, the entirety of which are incorporated herein by reference.

BACKGROUND

1. Field

This relates to lift pin modules used in a semiconductor/flat paneldisplay (FPD) manufacturing apparatus.

2. Background

Flat Panel Displays (FPDs) may include, for example, LCDs (LiquidCrystal Displays), PDPs (Plasma Display Panels) and OLEDs (Organic LightEmitting Diodes). A manufacturing apparatus used for manufacturing FPDsmay include a plurality of vacuum treatment devices, such as, forexample, a load lock chamber, a transfer chamber and a process chamber,for treating the surface of a substrate.

The load lock chamber may receive raw substrates from the outside, andmay also distribute processed substrates to the outside. The transferchamber may include a transfer robot that transfers substrates betweenchambers, thus feeding the raw substrates from the load lock chamber tothe process chamber and returning the processed substrates from theprocess chamber to the load lock chamber. The substrates may beprocessed in the process chamber by, for example, forming respectivelayers on the substrates or etching the substrates using plasma orthermal energy in a vacuum. Lift pins that lift the substrates may beprovided in the chambers to facilitate the loading and unloading ofsubstrates from the chambers. Consistent, stable movement and placementof the substrates may simplify the manufacturing process and yield ahigher quality FPD.

BRIEF DESCRIPTION OF THE DRAWINGS

The embodiments will be described in detail with reference to thefollowing drawings in which like reference numerals refer to likeelements wherein:

FIG. 1 is a sectional view of an exemplary process chamber;

FIG. 2 is a perspective view of a lift pin driving device of theexemplary process chamber shown in FIG. 1;

FIG. 3 is a sectional view of another exemplary process chamber;

FIG. 4 is a sectional view of a process chamber having a lift pindriving device according to a first embodiment as broadly describedherein;

FIG. 5 is a plan view of the lift pin driving device shown in FIG. 4;

FIG. 6 is a perspective view of the lift pin driving device shown inFIG. 4 and FIG. 5;

FIG. 7 is a perspective view of a lift pin driving device according to asecond embodiment as broadly described herein;

FIG. 8 is a perspective view of a lift pin driving device according to athird embodiment as broadly described herein;

FIG. 9 is a sectional view of a process chamber having a lift pindriving device according to a fourth embodiment as broadly describedherein;

FIG. 10 is a perspective view of the lift pin driving device shown inFIG. 9;

FIG. 11 is a sectional view of a process chamber having a lift pindriving device according to a fifth embodiment as broadly describedherein;

FIG. 12 is a plan view of the lift pin driving device shown in FIG. 11;

FIG. 13 is a partial perspective view of a portion of the lift pindriving device shown in FIG. 11 and FIG. 12;

FIG. 14 is a partial perspective view of a portion of a lift pin drivingdevice according to a sixth embodiment as broadly described herein; and

FIG. 15 is a partial perspective view of a portion of a lift pin drivingdevice according to a seventh embodiment as broadly described herein.

DETAILED DESCRIPTION

Reference will now be made in greater detail to various embodiments,examples of which are illustrated in the accompanying drawings. Whereverpossible, the same reference numerals will be used throughout thedrawings and the description to refer to the same or like parts.

The exemplary process chamber shown in FIG. 1 may include a chamber body10, and a gate 11 capable of maintaining a vacuum state in the chamberbody 10. The process chamber may also include an upper electrodeassembly 12 and a lower electrode assembly 14. The lower electrodeassembly 14 may support a substrate S thereon. The upper electrodeassembly 12 may include a shower head (not shown) for spraying processgas onto the substrate S.

The lower electrode assembly 14 may include a plurality of lift pins 20that can move the substrate S in the vertical direction for loading orunloading of the substrate S. The lower electrode assembly 14 may alsoinclude a plurality of pinholes 16 through which the lift pins 20 maymovably pass. Thus, the lift pins 20 may be moved upwards or downwardswithin the respective pinholes 16, thereby moving the substrate Spositioned on the upper surface of the lower electrode assembly 14.

For example, when a substrate S has been transferred from the outsideinto the chamber body 10 by a transfer unit (not shown), the lift pins20 may ascend to a predetermined height to receive the substrate S, andmaintain the substrate S positioned thereon at the predetermined height.After the transfer unit is moved from the chamber body 10, the lift pins20 may lower the substrate S and load the substrate S onto the uppersurface of the lower electrode assembly 14. Likewise, to discharge aprocessed substrate S to an outside of the chamber body 10, the liftpins 20 may lift the processed substrate S off of the upper surface ofthe lower electrode assembly 14, thus allowing the substrate S to bedischarged to the outside of the chamber body 10.

The lift pins 20 may be moved by a lift pin driving device 30 that movesthe plurality of lift pins 20 at the same time. The lift pin drivingdevice 30 may include a pin plate 35 to which the plurality of lift pins20 may be fixed. The lift pin driving device 30 may also include a drivemotor 32 and a ball screw 33 to move the pin plate 35 upwards ordownwards through a ball screw-type driving method. A bellows 22 maysurround each of the lift pins 20 exposed between the lower surface ofthe chamber body 10 and the upper surface of the pin plate 35 tomaintain a vacuum state inside the chamber body 10.

To uniformly and stably move the pin plate 35 and the plurality of liftpins 20 upwards or downwards, the lift pin driving device 30 may includetwo or more appropriately positioned drive motors 32, as shown in FIG. 1and FIG. 2. This allows for processing of larger FPD substrates S, as itwould otherwise be difficult to uniformly or stably move the pin plate35 and the lift pins 20 shown in FIG. 1 and FIG. 2 using only one drivemotor 32.

To uniformly and stably move the lift pins 20 of the lift pin drivingdevice 30 to a predetermined height at the same time, the drive motor 32should be precisely controlled. When using two drive motors 32, it maybe difficult to synchronize control of the two motors 32 to allow themotors 32 to simultaneously move the lift pins 20 to precisely the sameheight. If the two motors 32 are not precisely controlled and the pinplate 35 is, as a result, positioned at an incline, a phase differencemay be generated between the lift pins 20 that may cause damage to thesubstrate S during loading or unloading. It may be difficult to performa high quality substrate treatment when the lift pins 20 have such aphase difference.

A compensation control system may be used to monitor and control themotors 32 and compensate for any phase difference in the lift pins 20.However, the use of such a compensation control system may complicatethe control structure of the manufacturing device and may increase thecost of equipment.

The process chamber may be, for example, a PE (Plasma Enhanced) typechamber or an RIE (Reactive Ion Etching) type chamber, based on the typeof plasma generation method used. In an RIE type process chamber, anelectronic module for applying RF power may be installed in the spacebelow the chamber body 10. Thus, space to accommodate the two drivemotors 32 below the chamber body 10 of such an RIE type process chamberis limited, and the lift pin driving device 30 is then altered tooperate in the space below the chamber body 10, as shown in FIG. 3. Thistype of installation, in which the lift pins 20 and bellows 22 areelongated, provides space for the installation of an electronic module,such as a matching box R, under the chamber body 10. However, becausethe lift pins 20 and the bellows 22 are longer, operation of the liftpin driving device 30 may become unstable.

A process chamber as shown in FIGS. 4 through 6 may include a chamberbody 50, and an upper electrode assembly 52 and a lower electrodeassembly 54 placed within upper and lower portions of the chamber body50, respectively. The chamber body 50 may include a gate 51 forreceiving and discharging a substrate S. The upper electrode assembly 52may include a shower head (not shown) for spraying process gas onto theupper surface of the substrate S and treating the surface of thesubstrate S. The lower electrode assembly 54 may function as a substratesupport unit so as to support a substrate S subjected to surfacetreatment in the chamber body 50.

A plurality of lift pins 60 may pass vertically through the lowerelectrode assembly 54 and move the substrate S upwards or downwardsduring a process of loading or unloading the substrate S. To allow thelift pins 60 to pass through the lower electrode assembly 54, theassembly 54 may include a pin passing unit comprising a plurality ofpinholes 56.

A lift pin driving device 70 may be provided in a space below thechamber body 50. The chamber body 50 may also include a plurality ofpinholes 58, which, together with the pinholes 56, form the pin passingunit, and allow the lift pins 60 to extend through the lower end of thechamber body 50 so that the lift pins 60 may be operated by the lift pindriving device 70.

The lift pin driving device 70 may include a plurality of cams 80operated by one drive motor 71 to move the lift pins 60 upwards ordownwards. As shown in FIG. 5 and FIG. 6, drive shafts 75 may bearranged in a space below the chamber body 50, in a square arrangementhaving four drive shafts 75 as shown, or other arrangement asappropriate. A power transmission unit may be provided, for example, ateach corner of the square arrangement of four drive shafts 75, such thatthe power transmission units rotate at the same time. Each of the powertransmission units may include, for example, bevel gears 77 which areengaged with each other to provide for this rotation.

One of the drive shafts 75 (in the drawings, the drive shaft 75Lpositioned on the left) may receive rotational power from the drivemotor 71 through a worm gear unit having a worm 72 and a worm wheel 74.The worm gear unit may be positioned between the drive motor 71 and thedrive shaft 75L so that the power of the motor 71 may be perpendicularlytransmitted to the drive shaft 75L.

When the drive motor 71 is operated, the worm 72 and the worm wheel 74engaged with the worm 72 rotate. This causes the four drive shafts 75,which are coupled to each other by the bevel gears 77, to rotate at thesame time, thus moving the lift pins 60 upwards or downwards. Thus, theworm gear-type power transmission mechanism shown in FIG. 4 through FIG.6 can transmit power at a reduced rotational speed of the drive motor71, and without requiring the installation of an additional reductiongear.

In the embodiment shown in FIG. 4 through FIG. 6, three cams 80 areprovided on each of two drive shafts 75. However, a number of cams 80and the locations of the cams 80 may be adjusted as necessary. Forexample, the cams 80 may be instead or additionally provided on the leftand/or right drive shafts 75L and 75R. Further, when the cams 80 arearranged as shown in FIG. 4 through FIG. 6, the right drive shaft 75Rmay be removed from the lift pin driving device 70.

The drive shafts 75 may be rotatably coupled in a variety of ways. Forexample, a bearing may be rotatably coupled to a bracket installed onthe lower part of the chamber body 50, or may be fixed to a structureprovided in the space below the chamber body 50. Other couplingarrangements may also be appropriate.

As described above, the lift pins 60 may be configured such that theyare moved upwards or downwards by the cams 80. As shown in FIG. 4, thelift pins 60 may include pin parts 61, which may movably pass throughthe pinholes 56 and 58 of both the chamber body 50 and the lowerelectrode assembly 54, and contact parts 62, which may be formed as flatdisc parts on the lower ends of the pin parts 61, and which may comeinto contact with the respective cams 80. A bellows 65 may be connectedboth to the lower surface of the chamber body 50 and to the contact part62 of each of the lift pins 60 to seal off each of the pinholes 58 inthe chamber body 50.

The lift pin driving device 70 shown in FIG. 4 through FIG. 6 isconfigured such that both the drive shafts 75 and the cams 80 may berotated by one drive motor 71 to move the lift pins 60 upwards ordownwards. Thus, the lift pin driving device 70 has a simpleconstruction and can be more easily controlled than a device having twomotors.

Further, no drive parts (such as a motor) are positioned in a centralregion X of the space below the chamber body 50, as shown in FIG. 5.Thus, the central region X may be efficiently used. Particularly, in anRIE type process chamber, it is possible to easily accommodate alarge-scaled matching box R in the central region X of the space belowthe chamber body 50.

Although the construction of the lift pin driving device 70 shown inFIG. 4 through FIG. 6 has been described based on its use in a processchamber 50, it should be understood that this device 70 may be used withvarious other types of equipment that use these types of lift pins 60,such as a load lock chamber or a transfer chamber of an FPDmanufacturing apparatus, semiconductor equipment, or other equipment asappropriate.

FIG. 7 is a perspective view of a lift pin driving device according toanother embodiment as broadly described herein. In this embodiment, thegeneral shape of the lift pin driving device 70A may be similar to thatof the embodiment shown in FIG. 4 through FIG. 6. However, in the device70A shown in FIG. 7, the power transmission unit transmits power fromthe drive motor 71 to the drive shafts 75 using bevel gears 72A and 74A.The bevel gear 72A coupled to the drive motor 71 may be larger than thebevel gear 74A coupled to the drive shaft 75, as shown in FIG. 7.Further, in an alternative embodiment, a shaft 172 of a drive motor 171(shown in shadow in FIG. 7) may be directly connected to one of thedrive shafts 75. In this alternative embodiment, both the drive motor 71and the bevel gears 72A and 74A may be eliminated.

FIG. 8 is a perspective view of a lift pin driving device according toanother embodiment as broadly described herein. In this embodiment, thegeneral shape of the lift pin driving device 70B may be similar to thatof the embodiment shown in FIG. 7. However, the device 70B shown in FIG.8 may include an additional drive shaft 75B in a central portion of thelift pin driving device 70B. The lift pin driving device 70B may beefficiently used with large-scaled equipment, in which a portion, suchas, for example, a central area of a substrate may warrant additionalsupport by an additional lift pin 60B, in addition to the supportprovided to peripheral portions of the substrate by the lift pins 60.This additional shaft 75B and lift pin 60B may be positioned outside thecentral area, based on the requirements of a particular substrate andcapabilities of the equipment.

More specifically, as shown in FIG. 8, the additional drive shaft 75Bmay extend between opposite drive shafts 75, either perpendicular to thedrive shafts 75, or at another angle as appropriate. The powertransmission unit of the additional drive shaft 75B may include bevelgears 77B. A cam 80B may be provided on the additional drive shaft 75Bto move the additional lift pin 60B upwards or downwards, simultaneouslywith the other lift pins 60. This additional structure may be formed invarious ways by arranging the drive shafts 75 according to the locationsand number of the lift pins 60 and 60B and by providing a powertransmission unit comprising bevel gears 77B between neighboring driveshafts 75.

FIG. 9 illustrates a process chamber having a lift pin driving deviceaccording to another embodiment as broadly described herein. In thisembodiment, the general shape of the lift pin driving device 70C and theprocess chamber 50 having the device are similar to that of previousembodiments. However, in the device 70C shown in FIG. 9 and FIG. 10, thelift pins 60 may be mounted to a pin plate 66C. The pin plate 66C mayhave, for example, a rectangular frame shape, as shown in FIG. 10, orother shape as appropriate. The cams 80 provided on the drive shafts 75may move the pin plate 66C upwards or downwards, thus moving the liftpins 60 coupled thereto upwards or downwards.

The pin plate 66C may be configured in a variety of different ways bychanging the locations of the cams 80, which are not limited to thelocations of the lift pins 60. Use of the pin plate 66C may more stablyand precisely move the plurality of lift pins 60 simultaneously upwardsor simultaneously downwards using one drive motor 71.

Further, in an alternative embodiment, an additional lift pin 60C (shownin shadow in FIG. 10) may be provided, for example, in a central regionof the lift pin driving device 70C. In this alternative embodiment, anadditional pin plate 67C may extend across the rectangular frame-shapedpin plate 66C and the lift pin 60C may be installed on the additionalpin plate 67C. This structure may be efficiently used with a systemhaving a large size. When the two types of pin plates 66C and 67C areused in the lift pin driving device 70C, both the additional drive shaft75B and the additional cam 80B shown in FIG. 8 may be eliminated.

FIG. 11 through FIG. 13 are views of a process chamber having a lift pindriving device according to another embodiment. The process chamber maybe used for manufacturing FPDs, and may include a chamber body 150 inwhich a substrate S may be surface-treated in a vacuum state. Thechamber body 150 may include an upper electrode assembly 152 and a lowerelectrode assembly 154 in upper and lower portions thereof, and a gate151 for receiving and discharging a substrate S. The upper electrodeassembly 152 may include a shower head (not shown) for spraying processgas onto the upper surface of the substrate S and treating the surfaceof the substrate S. The lower electrode assembly 154 may function as asubstrate support unit that supports a substrate S being subjected tosurface treatment in the chamber body 150.

A plurality of lift pins 160 may pass vertically through the lowerelectrode assembly 154 to move the substrate S upwards or downwardsduring a process of loading or unloading the substrate S. To allow thelift pins 160 to pass through the lower electrode assembly 154, theassembly 154 may include a pin passing unit comprising a plurality ofpinholes 156.

A lift pin driving device 170 may be provided in the space below thechamber body 150. The chamber body 150 may also include a plurality ofpinholes 158, which, together with the pinholes 156, form the pinpassing unit, and allow the lift pins 160 to extend through the lowerend of the chamber body 150 so that the lift pins 160 may be operated bythe lift pin driving device 170.

The lift pin driving device 170 may include a plurality of pin plates180 operated by one drive motor 171 to move the lift pins 160 upwards ordownwards. As shown in FIG. 11 and FIG. 12, the plurality of pin plates180 may be positioned below the chamber body 150 to receive the lowerends of the respective lift pins 160. The lift pin driving device 170may also include a drive unit that moves the pin plates 180simultaneously upwards or simultaneously downwards, and a vertical guide185 that guides the upward or downward movement of the pin plates 180.

In certain embodiments, the pin plates 180 may be arranged in theperipheral region, which is located around the central region of thespace below the chamber body 150, as shown in FIG. 12. Thus, otherrequired elements, such as, for example, a matching box R, may bepositioned in the central region of the space below the chamber body150. As discussed above, the matching box R is an electronic module usedfor applying RF power to the lower electrode assembly 154 when theprocess chamber 150 is configured as an RIE (Reactive Ion Etching) typechamber or the process chamber is changed from a PE (Plasma Enhanced)type chamber.

Each of the lift pins 160 may be secured to a pin plate 180. In certainembodiments, multiple, such as, for example, two or three lift pins 160,may be secured to each of the pin plates 180. This plurality of pinplates 180 allows for movement of respective lift pins 160 upwards ordownwards as necessary.

The pin plates 180 may be coupled to each other using a link mechanism177 and may be moved upwards or downwards by a drive unit to move thelift pins 160 upwards or downwards. A bellows 165 used for sealing eachof the pinholes 158 of the chamber body 150 may be connected both to thelower surface of the chamber body 150 and to the upper end of each ofthe pin plates 180 or to the lower end of each of the lift pins 160.

The drive unit may include a drive plate 175 that moves upwards ordownwards through a ball screw-type driving method, and a plurality oflink mechanisms 177 that connect the respective pin plates 180 to thedrive plate 175 in, for example, a radial structure, as shown in FIG.12. Other arrangements may also be appropriate.

The drive plate 175 may have a plate structure of relatively small size,and may be placed at a central region in the space below the chamberbody 150. The drive plate 175 may be moved upwards or downwards by onedrive motor 171 and one ball screw 172. Guide means (not shown) may alsobe provided in the lift pin driving device 170 for guiding therectilinear movement of the drive plate 175. Further, although ballscrew-type driving method is shown in FIG. 11 through FIG. 13, it shouldbe understood that another type of actuator capable of moving the driveplate 175 upwards or downwards may be used.

The link mechanisms 177 may function as linear mechanisms, and may bemade of a material having sufficient strength to reduce strain during apower transmission process for executing vertical motion. Both ends ofeach of the link mechanisms 177 may be rotatably connected to the driveplate 175 and to its respective pin plate 180 through a variety ofjointing methods, such as a ball jointing method or a hinge jointingmethod, which allow the ends of the link mechanism 177 to move relativeto the drive plate 175 and to the pin plates 180.

As shown in FIG. 12, the link mechanisms 177 may be arranged in aperipheral region of the drive plate 175, and extend outward in radialdirections. Further, the link mechanisms 177 may be inclined upwards andoutwards, as shown in FIG. 11. Other arrangements may also beappropriate.

The vertical guide 185 may guide movement of the pin plates 180 andallow the pin plates 180 to be stably moved upwards or downwards whenthe plates 180 are moved by the drive unit. The vertical guide structurefor guiding the movement of the pin plates 180 may be configured in avariety of ways. For example, in the embodiment shown in FIG. 11 throughFIG. 13, the vertical guide structure is formed using both a rack 187and a pinion 186.

More specifically, as shown in FIG. 13, the rack 187 may be verticallyconnected to a lower surface of the chamber body 150, while the pinion186 may be mounted to a respective pin plate 180 and be engaged with therack 187. Thus, when the pin plate 180 moves upwards or downwards, thepinion 186 moves upwards or downwards along the rack 187, and guides andsupports the upward or downward movement of the pin plate 180. Inalternative embodiments, the rack 187 may be provided on the pin plate180, while the pinion 186 may be provided on the lower surface of thechamber body 150. To more stably support the pin plates 180, the rack187 may be located outside and the pinion 186 be located inside, asshown in FIG. 12.

The vertical guide 185 may also include a guide rod 188 that extendslongitudinally downwards from the lower end of the chamber body 150 andpasses through the pin plate 180. A guide hole 180 a may be formed inthe pin plate 180, and a stop nut 189 may be formed on the lower end ofthe guide rod 188 so as to prevent the pin plate 180 from beingseparated from the guide rod 188.

In the lift pin driving device shown in FIG. 11 through FIG. 13, theplurality of pin plates 180 may be located in the peripheral region soas to avoid the central region of the space below the chamber body 150.Further, the single drive motor 171 may be located in a region below thecentral region of the space, and may move the plurality of pin plates180 upwards or downwards at the same time. Thus, the layout of the spacebelow the chamber body may be arranged in a variety of ways. Further,all the lift pins 160 may be moved simultaneously upwards orsimultaneously downwards using the single drive motor 171. Further, thevertical guide 185 may be placed between each of the pin plates 180 andthe chamber body 150 so that the pin plates 180 and the lift pins 160can be moved upwards or downwards while being stably supported.

FIG. 14 is a perspective view of a vertical guide according to anotherembodiment. As shown in FIG. 14, the vertical guide 185A may include alinear guide instead of a rack 187 and pinion 186 as discussed abovewith respect to FIG. 13. The linear guide may be an LM (Linear Motion)guide including a fixed block 187A having a guide groove 187B, and amovable block 186A having a guide protrusion 186B. The guide protrusion186B may be movably engaged with the fixed block 187A in a dovetailengagement, or other arrangement as appropriate. The movable block 186Amay be integrally formed on the pin plate 180.

FIG. 15 is a perspective view of a vertical guide according to anotherembodiment. As shown in FIG. 15, the vertical guide 185B may include twoguide rods 188B. Two guide holes 180 b may be formed in the pin plate180, and two guide rods 188B, mounted to the lower part of the chamberbody 150, may be inserted into the respective guide holes 180 b, suchthat the vertical movement of the pin plate 180 can be guided by the twoguide rods 188B.

A lift pin driving device and an FPD manufacturing apparatus having thedevice as embodied and broadly described herein may move a plurality oflift pins upwards or downwards using a cam-type driving method, insteadof a conventional ball screw-type driving method, thus having a simpledriving structure and efficiently moving the lift pins upwards ordownwards.

A lift pin driving device and an FPD manufacturing apparatus having thedevice as embodied and broadly described herein may precisely move thelift pins upwards or downwards using one motor, thus easily controllingthe motor and precisely moving the lift pins upwards or downwards.

A lift pin driving device and an FPD manufacturing apparatus having thedevice as embodied and broadly described herein may be easily used in asystem having a large area and may enable the layout of the space belowthe chamber body to be constructed in a variety of types, and may reducethe cost of the equipment, thus reducing the production cost ofproducts.

A lift pin driving device and an FPD manufacturing apparatus having thedevice as embodied and broadly described here, the pin plate may bedivided into a plurality of plates, and the plurality of pin plates maybe arranged to move the lift pins upwards or downwards in peripheralregions, which are located around the central region of the space belowthe chamber body, thus enabling the layout of the space below thechamber body to be constructed in a variety of types, and to reduce thecost of the equipment, thus reducing the production cost of products.

In a lift pin driving device and an FPD manufacturing apparatus havingthe device as embodied and broadly described herein, the lift pins maybe precisely moved upwards or downwards at the same time using onemotor, thus easily controlling the motor and precisely moving the liftpins upwards or downwards.

A lift pin driving device as embodied and broadly described herein mayinclude a plurality of lift pins, arranged such that they pass through asubstrate support unit, the lift pins moving a substrate upwards ordownwards; a drive shaft rotatably mounted to a mounting structure at alocation below the substrate support unit; a drive unit for rotating thedrive shaft; and a cam mounted to the drive shaft and rotated by thedrive shaft, thus moving the lift pins upwards or downwards.

In certain embodiments, the substrate support unit may be configured asa lower electrode assembly.

In certain embodiments cam may be configured such that it is in directcontact with the lower ends of the lift pins, as shown in FIG. 4 throughFIG. 8.

In alternative embodiments, the lift pins may be fixed to a pin plate,and the cam may be configured to move the pin plate upwards ordownwards, thus moving the lift pins upwards or downwards, as shown inFIG. 9 and FIG. 10.

The drive shaft may include a plurality of drive shafts, which areconfigured to be rotated by a power transmission unit at the same time.In this embodiment, the power transmission unit may include bevel gears,which may be provided on the respective drive shafts and may be engagedwith each other.

In certain embodiments, plurality of drive shafts may be arranged in apolygonal arrangement.

In alternative embodiments, an additional drive shaft may be provided ina space defined by the drive shafts arranged in the polygonalarrangement, as shown in FIG. 8.

One of the plurality of drive shafts may be configured to receiverotational power from the drive unit. In this embodiment, the drive unitmay include a motor, and the motor and the drive shaft may transmitpower to each other through a worm gear or a bevel gear.

In alternative embodiments, the drive unit may include a motor, and theshaft of the motor may be directly connected to one of the plurality ofdrive shafts, thus transmitting power to the drive shaft, as shown bythe dotted line in FIG. 7.

An FPD manufacturing apparatus having a lift pin driving device asembodied and broadly described herein may include a chamber body, havinga pin passing unit in a lower part thereof; a support unit provided inthe chamber body to support a substrate thereon, with a plurality of pinpassing units formed in the support unit; and the lift pin drivingdevice placed in a space below the chamber body and driving a pluralityof lift pins provided in the pin passing units of both the chamber bodyand the support unit, thus moving the substrate upwards or downwards.

The chamber body may be provided therein with an upper electrodeassembly for spraying process gas and generating plasma, and treating asurface of the substrate, and the support unit may comprise a lowerelectrode assembly, placed below the upper electrode assembly so thatthey face each other.

The lift pin driving device and the FPD manufacturing apparatus havingthe device as embodied and broadly described herein may move the liftpins upwards or downwards using a cam-type driving method, instead ofthe conventional ball screw-type driving method, thus having a simpledriving structure and efficiently moving the lift pins upwards ordownwards.

Further, the system and method as embodied and broadly described hereinmay precisely move the lift pins upwards or downwards using one motor,thus easily controlling the motor and precisely moving the lift pinsupwards or downwards.

Further, the system and method as embodied and broadly described hereinmay be easily used in a system having a large area, and may enable thelayout of the space below the chamber body to be constructed in avariety of types, and may reduce the cost of the equipment, thusreducing the production cost of products.

A lift pin driving device as embodied and broadly described herein mayinclude a plurality of lift pins, arranged such that they pass through asubstrate support unit, the lift pins moving a substrate upwards ordownwards; a plurality of pin plates, to which the lower ends of therespective lift pins are securely mounted; a drive unit, connected tothe plurality of pin plates through a link mechanism and simultaneouslymoving the pin plates upwards or downwards; and a vertical guide forguiding the upward or downward movement of the pin plates.

In certain embodiments, the substrate support unit may be configured asa lower electrode assembly.

The pin plates may be arranged in a peripheral region, which is locatedaround the center of a space below the substrate support unit.

The drive unit may include a drive plate, moved upwards or downwardsthrough a ball screw-type method; and a plurality of link mechanismsconnecting the drive plate to the respective pin plates.

In certain embodiments, the vertical guide may include a rack and apinion, which are provided in the support unit and in each of the pinplates, respectively, such that the rack and pinion are engaged witheach other and guide the upward or downward movement of the pin plates,as shown in FIG. 11 through FIG. 13.

In alternative embodiments, the vertical guide may include linearguides, which are provided in the support unit and each of the pinplates, respectively, such that the linear guides are engaged with eachother through male and female engagement, as shown in FIG. 14.

In certain embodiments, each of the two types of vertical guides mayalso include a plurality of guide rods, which extend from the lower partof the support unit a predetermined length and pass through therespective pin plates.

In alternative embodiments, the vertical guide may include only aplurality of guide rods, which extend from the lower part of the supportunit to a predetermined length and pass through the respective pinplates, as shown in FIG. 15.

A FPD manufacturing apparatus having a lift pin driving device asembodied and broadly described herein may include a chamber body havinga pin passing unit in a lower part thereof; a support unit provided inthe chamber body to support a substrate thereon, with a plurality of pinpassing units formed in the support unit; and the lift pin drivingdevice placed in a space below the chamber body and driving a pluralityof lift pins provided in the pin passing units of both the chamber bodyand the support unit, thus moving the substrate upwards or downwards.

In certain embodiments, the chamber body may be provided therein with anupper electrode assembly for spraying process gas and generating plasma,and treating a surface of the substrate, and a lower electrode assemblymay be placed below the upper electrode assembly and constitute thesupport unit.

A lift pin driving device and a FPD manufacturing apparatus having thedevice as embodied and broadly described herein may include a pluralityof pin plates for moving respective lift pins, thus enabling the layoutof the space below the chamber body to be constructed in a variety oftypes without causing interference between the lift pin driving deviceand surrounding elements. Further, the plurality of pin plates may bearranged to move the lift pins upwards or downwards in peripheralregions, which are located around the central region of the space belowthe chamber body, thus enabling the space below the chamber body to beconstructed in a variety of types. In a system and method as embodiedand broadly described herein, the cost of the equipment may be reduced,thereby reducing the production cost of products.

Further, in a system and method as embodied and broadly describedherein, the lift pins may be precisely moved upwards or downwards at thesame time using one motor, thus easily controlling the motor andprecisely moving the lift pins upwards or downwards.

Any reference in this specification to “one embodiment,” “anembodiment,” “example embodiment,” etc., means that a particularfeature, structure, or characteristic described in connection with theembodiment is included in at least one embodiment of the invention. Theappearances of such phrases in various places in the specification arenot necessarily all referring to the same embodiment. Further, when aparticular feature, structure, or characteristic is described inconnection with any embodiment, it is submitted that it is within thepurview of one skilled in the art to effect such feature, structure, orcharacteristic in connection with other ones of the embodiments.

Although embodiments have been described with reference to a number ofillustrative embodiments thereof, it should be understood that numerousother modifications and embodiments can be devised by those skilled inthe art that will fall within the spirit and scope of the principles ofthis disclosure. More particularly, various variations and modificationsare possible in the component parts and/or arrangements of the subjectcombination arrangement within the scope of the disclosure, the drawingsand the appended claims. In addition to variations and modifications inthe component parts and/or arrangements, alternative uses will also beapparent to those skilled in the art.

1. A lift pin driving device configured for use with a substrate supportin a flat panel manufacturing device, comprising a driving structure,comprising: a plurality of shafts coupled together at respective endsthereof so as to form a closed polygonal arrangement of shafts thatdefine an open central portion; and a single driver configured to rotateone of the plurality of shafts, wherein the respective ends of theplurality of shafts are coupled such that rotation of the one of theplurality of shafts causes the plurality of shafts to all rotate in thesame direction simultaneously; and a plurality of lift pins coupled tothe driving structure, wherein the plurality of lift pins are configuredto move vertically through a substrate support positioned above thedriving structure as the single driver rotates the one of the pluralityof shafts; wherein each of the plurality of lift pins is coupled to oneof the plurality of shafts by a cam.
 2. The device of claim 1, whereinthe plurality of lift pins are configured to move simultaneously upwardsand simultaneously downwards through the substrate support as the driverrotates the one of the plurality of shafts.
 3. The device of claim 1,wherein an upper end of each of the plurality of lift pins contacts alower surface of a substrate positioned on the substrate support so asto lift or lower the substrate as the plurality of lift pins movevertically through the substrate support.
 4. The device of claim 1,wherein the single driver comprises: a single motor; and a drive shaftcoupled between the single motor and the one of the plurality of shafts,wherein the drive shaft is configured to transmit a rotational forcefrom the single motor to the one of the plurality of shafts so as torotate the one of the plurality of shafts.
 5. The device of claim 4,wherein the drive shaft is coupled to the one of the plurality of shaftsby a worm gear unit or a bevel gear unit.
 6. The device of claim 5,wherein the drive shaft and motor are positioned at an outside of anouter periphery of the closed polygonal arrangement of shafts.
 7. Thedevice of claim 4, further comprising a power transmission unitconfigured to transmit the rotational force received by the one of theplurality of shafts to the remaining plurality of shafts such that theplurality of shafts rotate together to move the driving structureupwards and downwards.
 8. The device of claim 7, wherein the powertransmission unit comprises bevel gears provided at a coupling betweenthe respective ends of the plurality of shafts such that rotation of theone of the plurality of shafts rotates the remaining plurality ofshafts.
 9. The device of claim 8, wherein a rotation of the plurality ofshafts moves the plurality of lift pins fixed thereto simultaneouslyupwards or simultaneously downwards based on a direction of rotation ofthe drive shaft.
 10. The device of claim 7, wherein a lower end of eachof the plurality of lift pins is coupled to a respective shaft of theplurality of shafts, and wherein the plurality of lift pins movesimultaneously upwards or simultaneously downwards based on a directionof rotation of the drive shaft.
 11. The device of claim 10, wherein thesingle driver comprises a single motor that moves the plurality of liftpins simultaneously upwards or simultaneously downwards.
 12. A flatpanel display manufacturing apparatus comprising the lift pin drivingdevice of claim 1.